Miniature Molecular Beam Epitaxy (Mini MBE)

This Request for Proposals (the “RFP”) is an invitation by the University of Ottawa (the “University”) to prospective proponents to submit proposals for a Miniature Molecular Beam Epitaxy (Mini MBE) , funded by the Canada Foundation for Innovation and the Ontario Research Fund, as further described in Appendix D (RFP Particulars) Section A (the “Deliverables”).

The University seeks proposals from qualified vendors for the supply, delivery, installation, commissioning, and training of a Miniature Molecular Beam Epitaxy (Mini MBE) for testing growth of laboratory scale chalcogenide thin film samples. The equipment will enable development of magnetic topological materials for high-performance memory and logic applications, as well as seeding future advanced materials optimization and prototyping.

The Mini MBE research system must be suitable for state-of-the-art novel materials exploration and ultra-high vacuum (UHV) surface science.

The commissioned system must possess Load Lock Chamber with storage of minimum 10 FLAG style sample plates, transfer rod, sufficient ports for pumps, gauges, future in situ expansion and integration; UHV Deposition Chamber of minimum 200 mm inner diameter (ID) made of vacuum-annealed non-magnetic stainless steel, minimum 6 DN40CF (2.75” outer diameter, OD) sized source ports, sufficient ports for viewing, pumps, wafer transfer, reflection high energy electron diffraction (RHEED), quartz crystal monitors, gauges, residual gas analyzer (RGA), water and/or applicable liquid nitrogen (LN2) cooling; Substrate Manipulator with continuous in-plane rotation and z-motion, minimum 1,200 °C continuous operation, integrated shutter and/or mask; Effusion Cells and/or e-beam evaporators, crucibles, power supplies; Pumps; Bakeout System; MBE Control, computer and bakeable cables, integrated and automatic control of ALL pressure reading, pump operating status, pneumatic gate valve positioning, water flow, all source and heater temperature, emergency handling of power and water shutdown, process; and Expert MBE Support on growth, maintenance and upgrade.

Mandatory Technical Specifications Requirements:

1.0 - Load Lock Chamber (LLC)
1.1 - LLC must have magazine storage of minimum 10 FLAG sample plates.
1.2 - LLC must have transfer rod, sufficient ports for pumps, gauges.

2.0 - UHV Deposition Chamber (DC)
2.1 - DC must have minimum 200 mm inner diameter, made of vacuum-annealed non-magnetic stainless steel.
2.2 - DC must have minimum 6 ports for DN40CF (2.75” OD) sized sources.
2.3 - DC must have sufficient ports for viewing, wafer transfer, pumps, gauges, RHEED, quartz crystal monitors, RGA, cooling.

3.0 - Substrate Manipulator (SM)
3.1 - SM must have continuous in-plane rotation and z-motion.
3.2 - SM must allow minimum 1,200 °C continuous operation.
3.3 - SM must allow sample transfer via e.g. wobble stick, have shutter.

4.0 - Cells
4.1 - System must have effusion cells, with crucibles, power supplies
4.2 - System must allow e-beam evaporators, with control, power.

5.0 - Pumps
5.1 - System must have pumps to reach UHV conditions during growth.
5.2 - System must have gauges to continuously monitor vacuum.
5.3 - System must allow bakeout for recovering ideal UHV after opening.

6.0 - MBE Control, Computer and Software
6.1 - A computer with MBE Control Software must be provided.
6.2 - System must have control of parameters, including: pressure, pump operating status, pneumatic gate valve positioning, water flow, all source and heater temperature, process recipe editing.

7.0 - Commissioning
7.1 - On-site installation and training must be included.
7.3 - CSA certification or equivalent is required, as per the Electrical Safety Authority: https://esasafe.com/electrical-products/recognized-certification-marks/.
If any electrical components do not arrive with an acceptable certification marking, the University must be allowed to open/modify the instrument as required in order to have it CSA Certified. Said inspection/modification, if required, must not void any warranty.

8.0 - Warranty
8.1 - Must include a minimum of one (1) year of warranty on parts and labour.
 

Bidding and Documents are available on http://www.merx.com. Fees may apply; See https://www.merx.com/public/pricing for more information.