Supply and Install of a Plasma Enhanced Chemical Vapor Deposition

Suppliers can find the complete tender document(s), at no cost, on: https://uwo.bonfirehub.ca.

Procuring Entity:
University of Western Ontario (Western)
Procurement Services
1151 Richmond Street
London, Ontario, Canada, N6A 3K7

Contact:
Scott Roth sroth6@uwo.ca         

Procurement Method:
Open tender whereby all interested Suppliers may submit a Proposal.

Description:
The Request for Proposal (RFP) is an invitation to submit offers for the Supply and Install of a Plasma Enhanced Chemical Vapor Deposition, as further described herein.
The Plasma Enhanced Chemical Vapor Deposition (PECVD) tool will be installed in the Western Nanofabrication Facility.
Applications will include deposition of silicon oxide, silicon nitride and amorphous silicon on silicon wafers.  Both single layers of pre-determined thickness and multi-layer structures of these films are required.
Refer to the RFP document for further information.
Budget:
The estimated total pre-tax budget is CAD$375,000 plus HST.
Estimated Quantities:
Available within the tender document

Submission Details:
All tender submissions must be uploaded electronically at https://uwo.bonfirehub.ca

Submission Deadline:
June 16, 2026 at 12:00 PM ET

Public Opening:
Not Applicable

Conditions for Participation:
Available within the tender document(s)

Mandatory Submission Requirements:
 

1. Appendix B- Submission Form
2. Appendix C- Rate Bid Form
3. Appendix D- Reference Form
4. Appendix E- Deliverables and Technical Requirements Questionnaire
5. Appendix F- Western’s Commitment to Sustainability in Procurement and Supporting Documents
6. Appendix G- Proponents Checklist

Complete submission requirements are provided within the tender document(s).


Scored Submission Requirements:
 

1. Mandatory Requirements
2. Experience, Qualifications and References
3. Technical Requirements
4. Service and Support
5. Sustainability
6. Value- Added Ideas
7. Accessibility (AODA)
8. Pricing
9. In-kind

This procurement is covered by Chapter 5 of the Canadian Free Trade Agreement (CFTA).
This procurement is covered by Chapter 19 of the Canada-European Union Comprehensive Economic Trade Agreement (CETA)

Delivery Date:
December 2026

Duration of Agreement:
Upon receipt of equipment and satisfaction of obligations as set out in the Agreement.

Additional Options:
Available in the tender document(s)

Negotiation:
At the end of the evaluation process, Western may identify one or more Suppliers with whom it wishes to enter into negotiations, by written notification.  See tender document(s) for further detail.

Prequalification:
Not Applicable

Responses must be submitted in English.

Suppliers should note that information contained within this Tender Notice is subject to change.  Suppliers are encouraged to download the tender document(s) which contain the most current information.
 
If there is a conflict between the tender document(s) and this Tender Notice, the tender document(s) will take precedence.
 

Bidding and Documents are available on http://www.merx.com. Fees may apply; See https://www.merx.com/public/pricing for more information.