Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system
Solicitation number BC205332
Publication date
Closing date and time 2024/11/15 17:00 EST
Description
** Note: The RFP is available for download on Merx.com ***
** Note: The RFP must be submitted in Merx.com ***
The RFP invites offers for the provision of the following equipment:
- A Plasma Enhanced Chemical Vapor Deposition (PECVD) system for depositing silicon-based materials.
- An Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) for metal etching.
The proponent must be able to supply both items.
THE DELIVERABLES
4D LABS at Simon Fraser University is acquiring infrastructure to enable further development of quantum- and microsystems-based technologies. In particular, they are seeking the following:
- PECVD (Plasma-Enhanced Chemical Vapor Deposition) system for deposition of silicon-based materials.
- ICP-RIE (Inductively Coupled Plasma Reactive Ion Etching) system for etching of metals.
The tools will be housed in a class 100 Clean Room facility, alongside a variety of micro- and nanofabrication equipment.
Key requirements for the systems:
- Designed for low-to-medium scale research and development.
- Flexible systems to allow for a wide range of materials to be used.
- Suitable for a multi-user facility with low service requirements.
- Simple to operate.
Please include the following instrument requirements in the proposal:
- Floor loading.
- Electrical power supply (e.g., 208V or 120V).
- Cooling (including pressure, flow, and heat load).
- Exhaust.
- Gases.
PECVD/ ICP-RIE Requirements:
Mandatory Specifications for PECVD and ICP-RIE
There is a basic configuration and performance specification that are mandatory. The proponent is to provide a quote for each item with these specifications in Appendix C – Rate Bid Form.
Optional Specifications for PECVD and ICP-RIE:
- Includes additional features or capabilities that are desirable.
- Will be considered in the value-added section.
- Pricing should be provided separately in the Value-Add section of Appendix D.
Non-mandatory specifications: This configuration is for additional options and is part of the Value-Add section in Appendix D.
Contract duration
Refer to the description above for full details.
Trade agreements
-
Please refer to tender description or tender documents
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Contact information
Contracting organization
- Organization
-
Simon Fraser University
- Address
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8888 University Dr WBurnaby, British Columbia, V5A 1S6Canada
- Contracting authority
- Paul Dhaliwal
- Email
- paul_dhaliwal@sfu.ca
- Address
-
8888 University Dr WBurnaby, British Columbia, V5A 1S6Canada
Bidding details
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