Supply and Install of a High Power Impulse Magnetron Sputtering System

Suppliers can find the complete tender document(s), at no cost, on: https://uwo.bonfirehub.ca.

Procuring Entity:
University of Western Ontario (Western)
Procurement Services
1151 Richmond Street
London, Ontario, Canada, N6A 3K7

Contact:
Scott Roth sroth6@uwo.ca         

Procurement Method:
Open tender whereby all interested Suppliers may submit a Proposal.

Description:
The RFP is an invitation to submit offers for the Supply and Install of High Power Impulse Magnetron Sputtering System, as further described herein.
This request is for a High Power Impulse Magnetron Sputtering (HiPIMS) System to deposit advanced thin films in a highly controlled environment. HiPIMS is an advanced sputtering technique capable of performing all conventional sputtering processes while additionally generating a highly ionized plasma. This enables enhanced control over film growth, composition, density, adhesion, and microstructure. Compared to conventional sputtering, it produces denser, smoother, and more adherent films with improved mechanical and functional properties. The system allows deposition of thin films with excellent uniformity over large-area substrates (e.g., 4” wafers) and high control over thickness and interface quality.
A key advantage of HiPIMS is its ability to perform reactive deposition at relatively low temperatures. The energetic ionized flux promotes the formation of oxides and nitrides without requiring high substrate temperatures, increasing throughput and compatibility with temperature-sensitive materials. In addition, substrate biasing and bipolar HiPIMS operation enable further tuning of film density, crystallinity, and performance.
The system will be installed at the Western Advanced Materials Foundry (WAMF), a controlled cleanroom environment that provides training, access, and maintenance for internal and external users.
The HiPIMS system will support a wide range of research activities, including the development of plasmonic sensors, high-efficiency optical coatings and solar cells, flexible electronics, and advanced functional coatings. Importantly, it will enable the fabrication of dense, defect-minimized protective coatings for corrosion and wear resistance, which are critical for energy, environmental, and industrial applications.
Refer to the RFP document for further information.
Budget:
The estimated total pre-tax budget is CAD$720,000.
Estimated Quantities:
Available within the tender document

Submission Details:
All tender submissions must be uploaded electronically at https://uwo.bonfirehub.ca

Submission Deadline:
June 16, 2026 at 12:00 PM ET

Public Opening:
Not Applicable

Conditions for Participation:
Available within the tender document(s)

Mandatory Submission Requirements:
 

1. Appendix B- Submission Form
2. Appendix C- Rate Bid Form
3. Appendix D- Reference Form
4. Appendix E- Deliverables and Technical Requirements Questionnaire
5. Appendix F- Western’s Commitment to Sustainability in Procurement and Supporting Documents
6. Appendix G- Proponents Checklist

Complete submission requirements are provided within the tender document(s).


Scored Submission Requirements:
 

1. Mandatory Requirements
2. Experience, Qualifications and References
3. Technical Requirements
4. Service and Support
5. Sustainability
6. Value- Added Ideas
7. Accessibility (AODA)
8. Pricing
9. In-kind

This procurement is covered by Chapter 5 of the Canadian Free Trade Agreement (CFTA).
This procurement is covered by Chapter 19 of the Canada-European Union Comprehensive Economic Trade Agreement (CETA)

Delivery Date:
December 2026

Duration of Agreement:
Upon receipt of equipment and satisfaction of obligations as set out in the Agreement.

Additional Options:
Available in the tender document(s)

Negotiation:
At the end of the evaluation process, Western may identify one or more Suppliers with whom it wishes to enter into negotiations, by written notification.  See tender document(s) for further detail.

Prequalification:
Not Applicable

Responses must be submitted in English.

Suppliers should note that information contained within this Tender Notice is subject to change.  Suppliers are encouraged to download the tender document(s) which contain the most current information.
 
If there is a conflict between the tender document(s) and this Tender Notice, the tender document(s) will take precedence.
 

Bidding and Documents are available on http://www.merx.com. Fees may apply; See https://www.merx.com/public/pricing for more information.