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CFI: Atomic Layer Etcher (ALE) System

Solicitation number 2026-RFPN-00502 CH

Publication date

Closing date and time 2026/06/15 14:30 EDT

Status Status Open

Description
The Atomic Layer Etcher, which is the subject of this RFP, is to be utilized for the precise etch of thin layers of dielectrics, metals and superconducting materials as part of the fabrication of quantum devices.  This system will form part of the growing toolset managed under the University of Waterloo’s Quantum-Nano Fabrication and Characterization Facility (QNFCF) core scientific platform.  The facility enables scientists and engineers to pursue frontier research in materials science, nanotechnology, and quantum information processing.
 

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    Contract duration

    The estimated contract period will be 0 month(s), with a proposed start date of 2027/02/28.

    Trade agreements

    • Canada-European Union Comprehensive Economic and Trade Agreement (CETA)

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    Contact information

    Contracting organization

    Organization
    University of Waterloo
    Address
    200 University Avenue West
    Waterloo, Ontario, N2L 3G1
    Canada
    Contracting authority
    Reception Services
    Phone
    519-888-4501
    Email
    procure@uwaterloo.ca
    Bidding details

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    Summary information

    Language(s)
    English
    Procurement method
    Competitive – Open Bidding

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